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Coherent J-50MUV-193 Pulse Energy Sensor

Updated:2024-11-25

Brand: Coherent
Model: J-50MUV-193
Description: This J-50MUV-193 energy sensor incorporates the MaxUV coating and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 193 nm and in
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Product Details

Coherent J-50MUV-193 Pulse Energy Sensor Description：

Datasheet

This J-50MUV-193 energy sensor incorporates the MaxUV coating and is optimized for use with ArF lasers operating at 193 nm and KrF lasers at 248 nm. This sensor is directly calibrated at 193 nm and includes spectral compensation from 193 nm to 2.1 µm. It is terminated in a SmartProbe DB25 cable and is directly compatible with FieldMaxII-TOP, FieldMaxII-P, LabMax-TOP, and LabMax-Pro SSIM meters.

A USB-direct (PN 1289935) model is available.

A large heatsink (PN 1123432) is available to extend the energy and repetition rates of EnergyMax sensors by increasing the average power capability.

Pyroelectric energy sensor with MaxUV coating for measuring laser pulses from 125 µJ to 250 mJ at up to 200 pps.

Key Features:

19 to 2.1 µm spectral range

50 mm active area diameter

125 µJ to 250 mJ energy range

200 pps repetition rate operation

ISO 17025 accredited

Specifications

Cable Type

J DB-25

Active Area Diameter

50 mm

Detector Coating

MaxUV

Energy Range

125 µJ to 250 mJ

Wavelength Range

190 nm to 2100 nm

Noise Equivalent Energy

<4 µJ

Maximum Pyroelectric Rep. Rate (pulses per second)

200

Maximum Average Power (watts)

Maximum Pulse Width (microseconds)

Maximum Energy Density (millijoules per square centimeter)

200 (at 193 nm, 10 ns)

Maximum Energy Density (millijoules per square centimeter)

260 (@248nm, 10ns)

Diffuser

DUV

Calibration Uncertainty (%)(k=2)

±3

Energy Linearity (%)

±3

Calibration Wavelength (nanometers)

193

Cable Length (meters)

2.5

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