PR-23-MS Refractive instrument for semiconductor industry

PR-23-MS refractometer is suitable for semiconductor liquid chemical measurement.The refraction meter uses the principle of optics to measure the refractive index of solution to determine the concentration of solid solution, so it can be used to measure a variety of solutions. The compact design is easy to integrate into the wet workbench or cabinet without taking up too much space. The built-in flow tank is made of ultra-pure modified PTFE, designed to prevent metal and corrosion-prone components from coming into contact with process fluids. All liquid receiving parts are made of ultra-pure modified PTFE. The prism material is sapphire. PR-23-MS provides a continuous 4-20 mA or digital measurement signal and provides real-time feedback to the control system when chemical concentrations do not meet specifications.PR-23-MS is compact and easy to install. It is suitable for bulk chemical distribution, chemical allocation at the point of use, and rehydration monitoring applications.

Application:

• Ø Prevent the wrong chemicals from entering the manufacturing process.
• Ø Optimize the etching process and extend the use time of etching solution (e.g. heated KOH).
• Ø This typically increases wafer production by 5% and reduces the consumption of cleaning chemicals in FEOL and BEOL cleaning processes (e.g., SC-1 or EKC-265).
• Ø The CMP paste is strictly controlled and the uniformity of polishing is improved.

Key features:

• Ø Nominal accuracy of 0.1% (mass percentage), for example, hydrochloric acid solution. For a solution consisting of multiple components, the measurement signal is used as a checksum of each component.
• Ø The optical core constructs the optical device.
• Ø Dual connection: One transmitter can run two sensors. A second sensor can be easily added later.
• Ø Process temperature range: -20°C -- 150°C (-4°F -- 300°F)
• Ø Built-in Pt1000, quick temperature measurement and automatic temperature compensation work.
• Ø ATEX Explosion-proof Certification, Zone 2, EX II 3 G EEx nA II T4.
• Ø FM Explosion-proof Certification, Class I, Div. 2, Groups A, B, C and D, T6. CSA certified for Class I, Div. 2.
• Ø CSA Explosion-proof Certification, Class I, Div. 2, Groups A, B, C and D, T4.
• Ø cCSAus Electrical Safety Certification, sensor: Class I, pollution level 3; Transmitter: Class I, pollution level of 2; The installation category is II.

Main Advantages:

Fully digital equipment: K - PATENTS® semiconductor industry refractive instrument PR-33-S for monitoring the process, can provide continuous Ethernet output signals. Compact design, directly connected to the process pipeline.

Maintain accurate and stable measurement at full scale: The refractive index measurement range is nD 1.3200-1.5300, equivalent to 0-100% (weight percentage). For high concentration HF, the optional range is nD 1.2600-1.4700. Nominal accuracy is R.I.+ 0.0002, usually equivalent to 0.1% (percentage by weight), e.g.:hydrochloric acid,The effects of particles, bubbles, turbulence and trace impurities at PPM concentration levels were measured.

Easy to maintain: Optical core design; No drift；no recalibration required；No mechanical adjustment is required.